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Finnish Research Centre Selects Cutting Edge Nanotechnology from Vistec

Vistec Lithography Inc. (www.vistec-semi.com) announced today that Micronova Nanofabrication Centre (www.micronova.fi) has selected one of its electron-beam lithography systems. The leading nanotechnology laboratory in Finland aims to use Vistec’s EBPG5000plusES for the design, development and fabrication of micro- and nanosystems. The cutting edge technology is specialized for multi-user environments and is therefore a future-proof match to the needs of Micronova.

At Micronova more than 360 employees and students of different facilities carry out research in diverse fields of nanotechnology. The Finnish institute aims to use the system for research in the fields of nanoelectronics, nanofabrication, microelectronics, nanophotonics and microfabrication. “This state-of-the-art electron-beam lithography system gives us the possibility to continue future-proof research at the very highest level. But not only the characteristics of the system determined our decision also the long term experience of Vistec in this field of research were decisive“, comments Dr. Veli-Matti Airaksinen, director of Aalto Nanofab at Micronova, the acquisition of the new system.

The Vistec EBPG5000pES is a high-performance lithography tool based on reliable and well-proven system architecture. The system is equipped for true 100kV / 1mm performance under regular electron-optical conditions with a wide capability for high throughput applications. Rainer Schmid, General Manager Vistec Lithography, Inc., explains further characteristics: “Its electron-optical column, rated for acceleration voltages of 50 and 100kV, enables the EBPG5000pES to provide a spot size down to <2.2nm. On the other hand nano-lithography structures smaller than 8nm can easily be generated.” Furthermore the system incorporates an interactive graphical user interface (GUI). “With this feature we enable the use for diverse, multiuser environments such as used at huge research institutes like Micronova or universities.”

“Micronova is one of the most scientific nano-research institutes in Europe. Therefore we are glad to have come to this agreement”, comments Schmid the order. By providing a steady growing number of advanced research institutes and universities with electron-beam lithography systems Vistec has demonstrated that its technology is state-of-the-art and best choice. “Vistec is known for its great support to its customers. But not only do our customers benefit from the cooperation, we do it as well. Having such a strong connection to cutting edge research institutes like Micronova enables us to continue the development of our technology to the demands of an even wider target group.”


Micronova Nanofabrication Centre is Finland’s National Research Infrastructure for micro- and nanotechnology, jointly operated by Aalto University and VTT Technical Research Centre of Finland. Micronova’s activities extend from fundamental physics to device prototyping, applied research and small-scale manufacturing. Technologies developed at Micronova include nanoelectronic and photonic devices, MEMS sensors, particle and X-ray detectors and THz technology.

Aalto University

Aalto University is a new multidisciplinary science and art community merging the strengths of three universities in the fields of science, technology, economics, art and design. Aalto University's cornerstones are its strengths in education and research, and its goal is to become one of the world's top universities. Aalto’s community includes 20,000 students as well as a staff of 4,700 of which 340 are professors.

VTT Technical Research Centre of Finland

VTT Technical Research Centre of Finland is a leading multi-technological applied research organization in Northern Europe. VTT creates new technology and science-based innovations in co-operation with domestic and foreign partners. VTT’s turnover is EUR 290 million and its personnel totals 3,100.

Vistec Electron Beam Lithography Group

The Vistec Electron Beam Lithography Group is a global manufacturer and supplier of electron-beam lithography systems with applications ranging from nano and bio-technology to photonics and industrial environments like mask making or direct writing for fast prototype development and design evaluation. The Vistec Electron Beam Lithography Group combines Vistec Lithography and Vistec Electron Beam.

Vistec Lithography

Vistec Lithography develops, manufactures, and sells electron-beam lithography equipment based on Gaussian Beam technology. Their electron-beam systems are world-wide accepted in advanced research laboratories and universities.

Vistec Electron Beam

Vistec Electron Beam is providing electron-beam lithography equipment based on Shaped Beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world. Their innovative electron-beam systems are used for microchip production and integrated optics as well as for scientific and commercial research.

For downloads of all media releases and images in print quality please visit the website at www.vistec-semi.com. If you require other formats or images please do not hesitate to contact us.

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