Welcome!

News Feed Item

ZEISS: Significant Progress Achieved in AIMS™ EUV Project

The Semiconductor Manufacturing Technology business group of ZEISS made significant progress in the development of the actinic aerial image metrology system AIMS™ EUV. First images of EUV photomasks were taken by the prototype of the system.

"The first images are a major milestone, because they verify the concept and the design of the whole system. We produced evidence that not only the optics is well defined, but also the source as well as all other major components are working together," states Dr. Jan Hendrik Peters, EUV Program Manager of Carl Zeiss SMS GmbH.

The AIMS™ EUV platform represents an essential tool for the development and manufacturing of defect-free EUVL masks supporting the 16 nm half-pitch (HP) technology node requirements with extendibility to the 11 nm HP node. Consequently the development of this tool is part of the EUVL Mask Infrastructure (EMI) Consortium activities. SEMATECH launched EMI in 2010 to address key infrastructure gaps for EUV in the area of mask metrology, by funding development of critical metrology tools.

“The AIMS™ EUV tool will be one of the most precise optical instruments fabricated for the semiconductor industry, and the EMI members are pleased to see our collaboration facilitate this technical accomplishment. With first images now available ZEISS is showing significant progress in building a production ready tool. Mask defectivity remains a key challenges to EUV readiness and it is exciting to see AIMS™ continue its journey towards realization," comments Michael Goldstein, EMI Program Manager & Sr. Principal Physicist, Intel assignee at SEMATECH.

The resolution of the system is already excellent and achieves the specification of the AIMS™ EUV system. The first images were taken on 64nm mask structures, corresponding to 16nm half-pitch at wafer level. In the course of the year the first customer masks will be measured on the system.

In parallel the preparations for the complementary AIMS™ EUV infrastructure is ongoing. Beginning in 2013 the first AIMS™ EUV Field Service Engineers were trained for installing and servicing the systems in the field.

To see more pictures, please visit: www.zeiss.com/press

ZEISS Semiconductor Manufacturing Technology

The Semiconductor Manufacturing Technology business group of ZEISS includes the Lithography Optics, Laser Optics and Semiconductor Metrology Systems business units. With a broad portfolio of products and globally leading know-how in the areas of lithography and optical modules, the business group covers various key processes in microchip production: as a developer and manufacturer of lithography optics, for example, the Lithography Optics business unit is a technology and market leader in this sector of the semiconductor industry. The portfolio of Laser Optics includes optical components for lithography lasers and subsystems for wafer inspection systems. With its inspection, repair, tuning and metrology systems, Semiconductor Metrology Systems focuses on the photomask, one of the core components of chip fabrication. In fiscal year 2012/13 the business group generated revenue of 934 million euros with a workforce of over 2,800 people. The business group is headquartered in Oberkochen.

More Stories By Business Wire

Copyright © 2009 Business Wire. All rights reserved. Republication or redistribution of Business Wire content is expressly prohibited without the prior written consent of Business Wire. Business Wire shall not be liable for any errors or delays in the content, or for any actions taken in reliance thereon.

Latest Stories
SYS-CON Events announced today that Commvault, a global leader in enterprise data protection and information management, has been named “Bronze Sponsor” of SYS-CON's 18th International Cloud Expo, which will take place on June 7–9, 2016, at the Javits Center in New York City, NY, and the 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. Commvault is a leading provider of data protection and information management...
Many banks and financial institutions are experimenting with containers in development environments, but when will they move into production? Containers are seen as the key to achieving the ultimate in information technology flexibility and agility. Containers work on both public and private clouds, and make it easy to build and deploy applications. The challenge for regulated industries is the cost and complexity of container security compliance. VM security compliance is already challenging, ...
The essence of data analysis involves setting up data pipelines that consist of several operations that are chained together – starting from data collection, data quality checks, data integration, data analysis and data visualization (including the setting up of interaction paths in that visualization). In our opinion, the challenges stem from the technology diversity at each stage of the data pipeline as well as the lack of process around the analysis.
A strange thing is happening along the way to the Internet of Things, namely far too many devices to work with and manage. It has become clear that we'll need much higher efficiency user experiences that can allow us to more easily and scalably work with the thousands of devices that will soon be in each of our lives. Enter the conversational interface revolution, combining bots we can literally talk with, gesture to, and even direct with our thoughts, with embedded artificial intelligence, wh...
Designing IoT applications is complex, but deploying them in a scalable fashion is even more complex. A scalable, API first IaaS cloud is a good start, but in order to understand the various components specific to deploying IoT applications, one needs to understand the architecture of these applications and figure out how to scale these components independently. In his session at @ThingsExpo, Nara Rajagopalan is CEO of Accelerite, will discuss the fundamental architecture of IoT applications, ...
SYS-CON Events announced today that MangoApps will exhibit at SYS-CON's 18th International Cloud Expo®, which will take place on June 7-9, 2016, at the Javits Center in New York City, NY. MangoApps provides modern company intranets and team collaboration software, allowing workers to stay connected and productive from anywhere in the world and from any device. For more information, please visit https://www.mangoapps.com/.
SYS-CON Events announced today that Tintri Inc., a leading producer of VM-aware storage (VAS) for virtualization and cloud environments, will exhibit at the 18th International CloudExpo®, which will take place on June 7-9, 2016, at the Javits Center in New York City, New York, and the 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA.
Enterprise networks are complex. Moreover, they were designed and deployed to meet a specific set of business requirements at a specific point in time. But, the adoption of cloud services, new business applications and intensifying security policies, among other factors, require IT organizations to continuously deploy configuration changes. Therefore, enterprises are looking for better ways to automate the management of their networks while still leveraging existing capabilities, optimizing perf...
SYS-CON Events announced today that Alert Logic, Inc., the leading provider of Security-as-a-Service solutions for the cloud, will exhibit at SYS-CON's 18th International Cloud Expo®, which will take place on June 7-9, 2016, at the Javits Center in New York City, NY. Alert Logic, Inc., provides Security-as-a-Service for on-premises, cloud, and hybrid infrastructures, delivering deep security insight and continuous protection for customers at a lower cost than traditional security solutions. Ful...
In his session at 18th Cloud Expo, Bruce Swann, Senior Product Marketing Manager at Adobe, will discuss how the Adobe Marketing Cloud can help marketers embrace opportunities for personalized, relevant and real-time customer engagement across offline (direct mail, point of sale, call center) and digital (email, website, SMS, mobile apps, social networks, connected objects). Bruce Swann has more than 15 years of experience working with digital marketing disciplines like web analytics, social med...
SYS-CON Events announced today Object Management Group® has been named “Media Sponsor” of SYS-CON's 18th International Cloud Expo, which will take place on June 7–9, 2016, at the Javits Center in New York City, NY, and the 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA.
In the rush to compete in the digital age, a successful digital transformation is essential, but many organizations are setting themselves up for failure. There’s a common misconception that the process is just about technology, but it’s not. It’s about your business. It shouldn’t be treated as an isolated IT project; it should be driven by business needs with the committed involvement of a range of stakeholders.
SYS-CON Events announced today that EastBanc Technologies will exhibit at SYS-CON's 18th International Cloud Expo®, which will take place on June 7-9, 2016, at the Javits Center in New York City, NY. EastBanc Technologies has been working at the frontier of technology since 1999. Today, the firm provides full-lifecycle software development delivering flexible technology solutions that seamlessly integrate with existing systems – whether on premise or cloud. EastBanc Technologies partners with p...
SYS-CON Events announced today that AppNeta, the leader in performance insight for business-critical web applications, will exhibit and present at SYS-CON's @DevOpsSummit at Cloud Expo New York, which will take place on June 7-9, 2016, at the Javits Center in New York City, NY. AppNeta is the only application performance monitoring (APM) company to provide solutions for all applications – applications you develop internally, business-critical SaaS applications you use and the networks that deli...
The cloud market growth today is largely in public clouds. While there is a lot of spend in IT departments in virtualization, these aren’t yet translating into a true “cloud” experience within the enterprise. What is stopping the growth of the “private cloud” market? In his general session at 18th Cloud Expo, Nara Rajagopalan, CEO of Accelerite, will explore the challenges in deploying, managing, and getting adoption for a private cloud within an enterprise. What are the key differences betwee...