Welcome!

News Feed Item

Global 450mm Consortium (G450C) at SUNY's NanoCollege Selects SOKUDO Immersion ArF Lithography Track to Be Added to Dainippon Screen's 450mm Tool Set in New York

Dainippon Screen Mfg. has confirmed our subsidiary company’s SOKUDO DUO 450mm coat/develop track system has been chosen by the Global 450mm Consortium (G450C), headquartered at the SUNY College of Nanoscale Science and Engineering (CNSE) in Albany, New York, for immersion ArF lithography and Directed Self-Assembly (DSA) applications. The SOKUDO DUO will be added to Dainippon Screen’s suite of 450mm cleaning equipment in CNSE’s NanoFab Xtension. Dainippon Screen’s 450mm wafer scrubber, single wafer cleaning, as well as millisecond annealing system will be among the equipment set to be available for the G450C, a public-private partnership announced by New York Governor Andrew M. Cuomo in September 2011 to facilitate the industry’s transition to the new, standard 450mm wafer size. The consortium is spearheaded by CNSE in partnership with Intel, IBM, GLOBALFOUNDRIES, Samsung, and TSMC.

SOKUDO DUO 450mm track system (Photo: Business Wire)

SOKUDO DUO 450mm track system (Photo: Business Wire)

The SOKUDO DUO will be interfaced in-line with a 450mm immersion ArF lithography system and will arrive at the G450C headquarters in Albany, NY, in the summer of 2014, when installation and characterization will begin. This complements and supports the July 2013 New York State announcement that a 450mm wafer ArF immersion lithography system is scheduled for delivery to CNSE in April 2015. As part of the agreement with the G450C, notably, SOKUDO will also provide 450mm virtual fab track process support to enable 450mm DSA-patterned test wafer production for G450C member equipment development. The DSA patterning capability will also be integrated into the SOKUDO DUO for complementary lithography with immersion ArF exposures.

“We are very pleased to be aligned with the G450C, in New York State, and its member companies, who are pioneering the 450mm wafer transition,” noted Tadahiro Suhara, CEO of SOKUDO Co., Ltd. and President of Dainippon Screen’s Semiconductor Equipment Company. “The depth of the Dainippon Screen group’s involvement in the G450C is a testament to our leadership position in 450mm semiconductor manufacturing equipment development. I am particularly proud of the SOKUDO DUO 450mm track system selection, to solidify our role as a leading-edge track supplier for the long term.”

“Under the leadership and vision of Governor Andrew Cuomo, New York is firmly established as the hub for the critical industry transition to 450mm wafer technology,” said Paul Farrar, Jr., CNSE Vice President for Manufacturing Innovation and General Manager of the G450C. “We are happy to continue our partnership with Dainippon Screen’s Semiconductor Equipment Company and welcome their subsidiary, SOKUDO Co., Ltd. to help in enabling the important transition to 450mm technology.”

At the SEMICON West SOKUDO Lithography Breakfast Forum in July 2013, it was revealed that a full 450mm wafer scale up of the SOKUDO DUO has been in operation for more than one year within the Dainippon Screen’s Process Technology Center (Hikone, Japan) clean room. SOKUDO was among the first companies to significantly support the consortium with various 450mm thin film coated test wafers, including adhesion layer coatings for 450mm nanoimprint lithography patterning and DSA capabilities and characterization.

As leading companies in semiconductor equipment, Dainippon Screen and SOKUDO will continue to deliver world-class products and contribute to the development of the industry.

About Dainippon Screen Mfg. Co., Ltd.

Dainippon Screen was established in 1943 and is currently one of the top 10 suppliers of semiconductor equipment, including wafer cleaning and annealing systems. It has expanded its base with core image processing, lithography, and cleaning technologies developed over the years, including businesses in flat panel display, printed circuit board, and media technologies. URL: www.screen.co.jp/eng/

About SOKUDO Co., Ltd.

SOKUDO is a subsidiary company of Dainippon Screen focused on advanced coat/develop track systems for semiconductor manufacturing. SOKUDO’s line of products serve a full range of lithography applications (such as i-line, KrF, immersion ArF, EUV, E-Beam), as well as various niche markets covering the 50 to 450 mm substrate size range. URL: www.sokudo.com

About SUNY CNSE

The SUNY College of Nanoscale Science and Engineering (CNSE) is the world leader in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE represents the world’s most advanced university-driven research enterprise, with more than $20 billion in high-tech investments and over 300 corporate partners. The 1.3 million-square-foot Albany NanoTech megaplex is home to more than 3,100 scientists, researchers, engineers, students, and faculty. URL: www.sunycnse.com

More Stories By Business Wire

Copyright © 2009 Business Wire. All rights reserved. Republication or redistribution of Business Wire content is expressly prohibited without the prior written consent of Business Wire. Business Wire shall not be liable for any errors or delays in the content, or for any actions taken in reliance thereon.

Latest Stories
Data is an unusual currency; it is not restricted by the same transactional limitations as money or people. In fact, the more that you leverage your data across multiple business use cases, the more valuable it becomes to the organization. And the same can be said about the organization’s analytics. In his session at 19th Cloud Expo, Bill Schmarzo, CTO for the Big Data Practice at EMC, will introduce a methodology for capturing, enriching and sharing data (and analytics) across the organizati...
DevOps at Cloud Expo, taking place Nov 1-3, 2016, at the Santa Clara Convention Center in Santa Clara, CA, is co-located with 19th Cloud Expo and will feature technical sessions from a rock star conference faculty and the leading industry players in the world. The widespread success of cloud computing is driving the DevOps revolution in enterprise IT. Now as never before, development teams must communicate and collaborate in a dynamic, 24/7/365 environment. There is no time to wait for long dev...
I'm a lonely sensor. I spend all day telling the world how I'm feeling, but none of the other sensors seem to care. I want to be connected. I want to build relationships with other sensors to be more useful for my human. I want my human to understand that when my friends next door are too hot for a while, I'll soon be flaming. And when all my friends go outside without me, I may be left behind. Don't just log my data; use the relationship graph. In his session at @ThingsExpo, Ryan Boyd, Engi...
SYS-CON Events announced today that Secure Channels will exhibit at the 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. The bedrock of Secure Channels Technology is a uniquely modified and enhanced process based on superencipherment. Superencipherment is the process of encrypting an already encrypted message one or more times, either using the same or a different algorithm.
The vision of a connected smart home is becoming reality with the application of integrated wireless technologies in devices and appliances. The use of standardized and TCP/IP networked wireless technologies in line-powered and battery operated sensors and controls has led to the adoption of radios in the 2.4GHz band, including Wi-Fi, BT/BLE and 802.15.4 applied ZigBee and Thread. This is driving the need for robust wireless coexistence for multiple radios to ensure throughput performance and th...
The Internet of Things can drive efficiency for airlines and airports. In their session at @ThingsExpo, Shyam Varan Nath, Principal Architect with GE, and Sudip Majumder, senior director of development at Oracle, will discuss the technical details of the connected airline baggage and related social media solutions. These IoT applications will enhance travelers' journey experience and drive efficiency for the airlines and the airports. The session will include a working demo and a technical d...
SYS-CON Events announced today the Enterprise IoT Bootcamp, being held November 1-2, 2016, in conjunction with 19th Cloud Expo | @ThingsExpo at the Santa Clara Convention Center in Santa Clara, CA. Combined with real-world scenarios and use cases, the Enterprise IoT Bootcamp is not just based on presentations but with hands-on demos and detailed walkthroughs. We will introduce you to a variety of real world use cases prototyped using Arduino, Raspberry Pi, BeagleBone, Spark, and Intel Edison. Y...
Fact is, enterprises have significant legacy voice infrastructure that’s costly to replace with pure IP solutions. How can we bring this analog infrastructure into our shiny new cloud applications? There are proven methods to bind both legacy voice applications and traditional PSTN audio into cloud-based applications and services at a carrier scale. Some of the most successful implementations leverage WebRTC, WebSockets, SIP and other open source technologies. In his session at @ThingsExpo, Da...
If you’re responsible for an application that depends on the data or functionality of various IoT endpoints – either sensors or devices – your brand reputation depends on the security, reliability, and compliance of its many integrated parts. If your application fails to deliver the expected business results, your customers and partners won't care if that failure stems from the code you developed or from a component that you integrated. What can you do to ensure that the endpoints work as expect...
Traditional on-premises data centers have long been the domain of modern data platforms like Apache Hadoop, meaning companies who build their business on public cloud were challenged to run Big Data processing and analytics at scale. But recent advancements in Hadoop performance, security, and most importantly cloud-native integrations, are giving organizations the ability to truly gain value from all their data. In his session at 19th Cloud Expo, David Tishgart, Director of Product Marketing ...
While DevOps promises a better and tighter integration among an organization’s development and operation teams and transforms an application life cycle into a continual deployment, Chef and Azure together provides a speedy, cost-effective and highly scalable vehicle for realizing the business values of this transformation. In his session at @DevOpsSummit at 19th Cloud Expo, Yung Chou, a Technology Evangelist at Microsoft, will present a unique opportunity to witness how Chef and Azure work tog...
Information technology is an industry that has always experienced change, and the dramatic change sweeping across the industry today could not be truthfully described as the first time we've seen such widespread change impacting customer investments. However, the rate of the change, and the potential outcomes from today's digital transformation has the distinct potential to separate the industry into two camps: Organizations that see the change coming, embrace it, and successful leverage it; and...
SYS-CON Events announced today that China Unicom will exhibit at the 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. China United Network Communications Group Co. Ltd ("China Unicom") was officially established in 2009 on the basis of the merger of former China Netcom and former China Unicom. China Unicom mainly operates a full range of telecommunications services including mobile broadband (GSM, WCDMA, LTE F...
Enterprise IT has been in the era of Hybrid Cloud for some time now. But it seems most conversations about Hybrid are focused on integrating AWS, Microsoft Azure, or Google ECM into existing on-premises systems. Where is all the Private Cloud? What do technology providers need to do to make their offerings more compelling? How should enterprise IT executives and buyers define their focus, needs, and roadmap, and communicate that clearly to the providers?
The Transparent Cloud-computing Consortium (abbreviation: T-Cloud Consortium) will conduct research activities into changes in the computing model as a result of collaboration between "device" and "cloud" and the creation of new value and markets through organic data processing High speed and high quality networks, and dramatic improvements in computer processing capabilities, have greatly changed the nature of applications and made the storing and processing of data on the network commonplace.