|By PR Newswire||
|April 1, 2014 08:00 PM EDT||
DUBLIN, April 2, 2014 /PRNewswire/ --
Research and Markets (http://www.researchandmarkets.com/research/9r5dkx/invensense) has announced the addition of the "InvenSense MPU-9250 9-Axis MEMS IMU Technology Analysis" report to their offering.
For its second generation of 9 DoF sensor, InvenSense manages to integrate a 6-Axis Accelerometer/Gyroscope and a 3-Axis Magnetometer in a cost effective QFN package of only 3x3mm (45% footprint reduction compared to the previous generation).
This package reduction has been made possible thanks to a new design of the 3-axis gyroscope which now uses a single structure vibratory compared to three different structures for the previous generation of gyros. This new design results in a shrink of 40% of the 3-axis gyro area. The second benefice of this new design is that Nasiri process has been changed: cavities which were traditionally etched in the ASIC to allow MEMS structures moving are no longer used, thus resulting in cost reduction.
The MPU-9250 also integrates a new 3-Axis magnetometer from AKM, the AK8963, which features almost 40% size reduction compared to previous generation and sensitivity improvement with 0.15µT/LSB.
The Technology Analysis report contains only Physical Analysis & Manufacturing Process Flow. A full reverse costing analysis report is also available. For more information please click on the link below.
Key Topics Covered:
- Package Views & Dimensions
- Package Opening
- Wire bonding Process
- Package Cross-Section
- View, Dimensions & Marking
- MEMS Removed
- MEMS Sensing Area
- MEMS Cap
- ASIC Delayering & Process
- Die Cross-Section: ASIC
- Die Cross-Section: MEMS
- Die Cross-Section: Sensor
- Die Cross-Section: Cap
- View, Dimensions & Marking
- Hall Sensors
- Delayering & Process
- Die Cross-Section
- Magnetic Concentrator Cross-Section
Comparison with previous generation
Manufacturing Process Flow
- MPU-6500 ASIC Front-End Process
- MPU-6500 MEMS Process Flow
- AK8963 ASIC Front-End Process
- AK8963 Magnetic Concentrator Process Flow
- Wafer Fabrication Units
- Packaging Process Flow & Assembly Unit
For more information visit http://www.researchandmarkets.com/research/9r5dkx/invensense
Media Contact: Laura Wood, +353-1-481-1716, [email protected]
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