Welcome!

News Feed Item

SACHEM Introduces Reveal Etch(TM), Co-Authors Paper With SSEC on Advancements in TSV Silicon Etching at ECTC 2014

AUSTIN, TX--(Marketwired - May 30, 2014) - SACHEM is announcing the release of Reveal Etch™, a wet chemistry designed to enable a single-step silicon etch / TSV reveal process. SACHEM and Solid State Equipment, LLC (SSEC) developed the process for this chemistry and optimized its use in a single-wafer processor.

SACHEM Associates Dr. Yongqiang Lu, Sian Collins, Dr. Kevin McLaughlin, and Dr. Craig Allen, in conjunction with SSEC Associates Laura B. Mauer, John Taddei, and Ramey Youssef, jointly issued a technical paper on a new wet process alternative to the polish / plasma etch TSV reveal process.

SSEC and SACHEM have worked on this new chemistry since early 2013. In February of 2014, the two companies produced a technical paper and presented their findings at IEEE Electronic Components and Technology Conference (ECTC 2014) on Thursday, May 29th.

SSEC set out to further optimize its process chemistries by working with SACHEM to develop a proprietary aqueous chemistry that contains no potassium and is residue free. Not only does this new chemistry address many issues limiting wet processing usage, but there are significant cost savings with the elimination of the extensive KOH residues clean step.

"The SACHEM Reveal Etch chemistry is a key component to our TSV Revealer configuration on the latest SSEC platform called WaferEtch™," stated Erwan Le Roy, Marketing Vice President of SSEC. "After years of dedicated R&D for this 2.5D/3D application, we enabled the lowest cost-of-ownership equipment by integrating all the key components in one single tool -- silicon thickness metrology for accurate endpointing determination, wet etch with a spin-etch chemistry to avoid using separate CMP equipment, a final etch with the Reveal Etch chemistry to uniformly expose the TSVs and wet cleaning."

"SACHEM's developmental reveal etch chemistry combines our core capability in formulation, extensive knowledge of silicon etching and our high-purity expertise. Our solution optimizes etch rate and surface roughness," stated Kevin McLaughlin, Global Electronic Materials Market Manager at SACHEM, Inc. "We have taken a significant step forward in enabling the TSV process by combining our expertise with that of SSEC," says McLaughlin.

The Electronic Components and Technology Conference (ECTC) is the premier international event that brings together the best in packaging, components and microelectronic systems science, technology, and education in an environment of cooperation and technical exchange. ECTC is sponsored by the Components, Packaging and Manufacturing Technology (CPMT) Society of the IEEE.

Click here to download the Technical Paper: Wet Silicon Etch Process for TSV Reveal.

About SACHEM
SACHEM, Inc. is a global chemical science company with full commercial operations in Japan, the United States, the Netherlands (Zaltbommel), and China. For over 60 years SACHEM has provided chemical solutions and services to customers in key markets including electronics, advanced ceramics, biotechnology, starch modification, polymers, catalysts, pharmaceutical and agrochemical. Based in Austin, Texas, SACHEM's expanding worldwide operations include manufacturing and research facilities in North America, Europe, and Asia, with a global service network and presence spanning over 30 countries.

About Solid State Equipment, LLC
Founded in 1965 and headquartered in Horsham, Pennsylvania, Solid State Equipment, LLC (DBA SSEC) is a manufacturer of single wafer wet processing equipment for the semiconductor industry. Solid State Equipment maintains worldwide sales and technical service offices in Horsham, Pennsylvania; San Jose, California; Regensburg, Germany; Cramlington, England; Taiwan, R.O.C.; Shanghai, P.R.C; Woodlands, Singapore; Gyeonggi, R.O.K.; and Laguna, Philippines.

See SSEC's press release from July 23, 2013 about the new chemistry: "SSEC's New Chemistry for TSV Reveal" http://www.3dincites.com/2013/07/semicon-west-3d-technology-updates-ssecs-new-chemistry-for-tsv-reveal/

Embedded Video Available: http://youtu.be/TL1hRpUFz-0

Contact:
Allison Mustin
512-421-4920
Email contact

More Stories By Marketwired .

Copyright © 2009 Marketwired. All rights reserved. All the news releases provided by Marketwired are copyrighted. Any forms of copying other than an individual user's personal reference without express written permission is prohibited. Further distribution of these materials is strictly forbidden, including but not limited to, posting, emailing, faxing, archiving in a public database, redistributing via a computer network or in a printed form.

Latest Stories
SYS-CON Events has announced today that Roger Strukhoff has been named conference chair of Cloud Expo and @ThingsExpo 2016 Silicon Valley. The 19th Cloud Expo and 6th @ThingsExpo will take place on November 1-3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. "The Internet of Things brings trillions of dollars of opportunity to developers and enterprise IT, no matter how you measure it," stated Roger Strukhoff. "More importantly, it leverages the power of devices and the Interne...
"There's a growing demand from users for things to be faster. When you think about all the transactions or interactions users will have with your product and everything that is between those transactions and interactions - what drives us at Catchpoint Systems is the idea to measure that and to analyze it," explained Leo Vasiliou, Director of Web Performance Engineering at Catchpoint Systems, in this SYS-CON.tv interview at 18th Cloud Expo, held June 7-9, 2016, at the Javits Center in New York Ci...
Predictive analytics tools monitor, report, and troubleshoot in order to make proactive decisions about the health, performance, and utilization of storage. Most enterprises combine cloud and on-premise storage, resulting in blended environments of physical, virtual, cloud, and other platforms, which justifies more sophisticated storage analytics. In his session at 18th Cloud Expo, Peter McCallum, Vice President of Datacenter Solutions at FalconStor, discussed using predictive analytics to mon...
Redis is not only the fastest database, but it is the most popular among the new wave of databases running in containers. Redis speeds up just about every data interaction between your users or operational systems. In his session at 19th Cloud Expo, Dave Nielsen, Developer Advocate, Redis Labs, will share the functions and data structures used to solve everyday use cases that are driving Redis' popularity.
Most organizations prioritize data security only after their data has already been compromised. Proactive prevention is important, but how can you accomplish that on a small budget? Learn how the cloud, combined with a defense and in-depth approach, creates efficiencies by transferring and assigning risk. Security requires a multi-defense approach, and an in-house team may only be able to cherry pick from the essential components. In his session at 19th Cloud Expo, Vlad Friedman, CEO/Founder o...
"We host and fully manage cloud data services, whether we store, the data, move the data, or run analytics on the data," stated Kamal Shannak, Senior Development Manager, Cloud Data Services, IBM, in this SYS-CON.tv interview at 18th Cloud Expo, held June 7-9, 2016, at the Javits Center in New York City, NY.
With the proliferation of both SQL and NoSQL databases, organizations can now target specific fit-for-purpose database tools for their different application needs regarding scalability, ease of use, ACID support, etc. Platform as a Service offerings make this even easier now, enabling developers to roll out their own database infrastructure in minutes with minimal management overhead. However, this same amount of flexibility also comes with the challenges of picking the right tool, on the right ...
As organizations shift towards IT-as-a-service models, the need for managing and protecting data residing across physical, virtual, and now cloud environments grows with it. Commvault can ensure protection, access and E-Discovery of your data – whether in a private cloud, a Service Provider delivered public cloud, or a hybrid cloud environment – across the heterogeneous enterprise. In his general session at 18th Cloud Expo, Randy De Meno, Chief Technologist - Windows Products and Microsoft Part...
The Internet of Things will challenge the status quo of how IT and development organizations operate. Or will it? Certainly the fog layer of IoT requires special insights about data ontology, security and transactional integrity. But the developmental challenges are the same: People, Process and Platform. In his session at @ThingsExpo, Craig Sproule, CEO of Metavine, demonstrated how to move beyond today's coding paradigm and shared the must-have mindsets for removing complexity from the develo...
SYS-CON Events announced today that MangoApps will exhibit at the 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. MangoApps provides modern company intranets and team collaboration software, allowing workers to stay connected and productive from anywhere in the world and from any device.
The IETF draft standard for M2M certificates is a security solution specifically designed for the demanding needs of IoT/M2M applications. In his session at @ThingsExpo, Brian Romansky, VP of Strategic Technology at TrustPoint Innovation, explained how M2M certificates can efficiently enable confidentiality, integrity, and authenticity on highly constrained devices.
“We're a global managed hosting provider. Our core customer set is a U.S.-based customer that is looking to go global,” explained Adam Rogers, Managing Director at ANEXIA, in this SYS-CON.tv interview at 18th Cloud Expo, held June 7-9, 2016, at the Javits Center in New York City, NY.
"We've discovered that after shows 80% if leads that people get, 80% of the conversations end up on the show floor, meaning people forget about it, people forget who they talk to, people forget that there are actual business opportunities to be had here so we try to help out and keep the conversations going," explained Jeff Mesnik, Founder and President of ContentMX, in this SYS-CON.tv interview at 18th Cloud Expo, held June 7-9, 2016, at the Javits Center in New York City, NY.
DevOps at Cloud Expo – being held November 1-3, 2016, at the Santa Clara Convention Center in Santa Clara, CA – announces that its Call for Papers is open. Born out of proven success in agile development, cloud computing, and process automation, DevOps is a macro trend you cannot afford to miss. From showcase success stories from early adopters and web-scale businesses, DevOps is expanding to organizations of all sizes, including the world's largest enterprises – and delivering real results. Am...
SYS-CON Events announced today that Isomorphic Software will exhibit at DevOps Summit at 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. Isomorphic Software provides the SmartClient HTML5/AJAX platform, the most advanced technology for building rich, cutting-edge enterprise web applications for desktop and mobile. SmartClient combines the productivity and performance of traditional desktop software with the simp...