Welcome!

News Feed Item

ETEL XYZT Planar Platform Now Available in North America

SCHAUMBURG, IL--(Marketwired - August 14, 2014) - ETEL is pleased to announce the XYZT Planar Platform is now available in North America through HEIDENHAIN Corporation. The XYZT Planar Platform is a proven, reliable stage with over 100 units currently in the field worldwide. This system provides excellent dynamic flatness and bi-directional repeatability, making it suitable for a wide range of applications.

The XYZT Planar Platform is a hybrid mechanical/air bearing stage dedicated to step-and-scan applications. The stage is modular and can be outfitted with the components best suited to each individual application. Thanks to the flexibility of the platform, it has been used in wafer process control applications such as Critical Dimension and Thin Film Metrology, as well as in Wafer Scribing and Wafer Laser Thermal Annealing.

The hybrid nature of the XYZT Planar Platform allows the user to enjoy the best qualities of both mechanical and air bearings. The mechanical bearings provide high stiffness in the XY plane, allowing for high accelerations (up to 1.2g) and great bi-directional repeatability (±0.5µm for the X and Y axes). Thanks to the air bearing, the platform is also able to provide excellent dynamic flatness over the full range of travel.

The standard XYZT Planar Platform mounts an ETEL ZT Combined Module on the gantry beam of the XY stage. The ZT Combined Module provides infinite Theta rotation and dual Z-axes: a coarse Z axis for wafer loading and unloading, and a fine Z axis for focus adjustment. This module can be replaced to best suit the needs of an application, whether that application requires only Z motion, pure Theta motion, or ZT motion with tip/tilt correction. The stroke of the X and Y axes can be adjusted to accommodate a 300mm or 450mm wafer, and even longer strokes are also available. The platform can also be integrated with ETEL's QuiET Active Isolation System to further improve system performance.

The advantages offered by the ETEL XYZT Planar Platform include, but are not limited to, the following:

• Flatness of motion given by the air bearing

• Unlimited rotation in Theta

• Built-in vacuum supply at chuck level

• Dual Z integration: Coarse travel for loading/unloading and fine travel for focus adjustment

• Compact footprint

• ISO2 clean room compatibility

• Position Stability of ±25nm for X and Y axes, ±15nm for Z axis, and ±0.2arcsec for T axis

• Bi-directional repeatability of ±0.5µm for X and Y axes, ±0.3µm for Z axis, and ±2arcsec for T axis

Detailed information about ETEL's XYZT Planar Platform is available at http://www.etel.ch/motion-systems/planar-platforms/. ETEL takes pride in their policy of full disclosure about their system performances. It is standard for all data sheets to list specifications at three-sigma to ensure the user is able to utilize the performance that the system lists.

For more information on this platform, call ETEL Systems Product Specialist Mark Skaer at 847-490-7812 ([email protected]) or Public Relations Manager Kathleen Stoneski at HEIDENHAIN at 877-565-9151 ([email protected]). ETEL's website is www.etelusa.com

ETEL S.A. is based in Switzerland with exclusive North American distribution through HEIDENHAIN Corporation in Schaumburg, IL.  As a leading international supplier of direct drive and motion control components and integrated systems, ETEL supports high tech industry with linear motors, torque motors, positioning stages, and motion controllers/systems.

The following files are available for download:

More Stories By Marketwired .

Copyright © 2009 Marketwired. All rights reserved. All the news releases provided by Marketwired are copyrighted. Any forms of copying other than an individual user's personal reference without express written permission is prohibited. Further distribution of these materials is strictly forbidden, including but not limited to, posting, emailing, faxing, archiving in a public database, redistributing via a computer network or in a printed form.

Latest Stories
VeriStor Systems has announced that CRN has named VeriStor to its 2017 Managed Service Provider (MSP) 500 list in the Elite 150 category. This annual list recognizes North American solution providers with cutting-edge approaches to delivering managed services. Their offerings help companies navigate the complex and ever-changing landscape of IT, improve operational efficiencies, and maximize their return on IT investments. In today’s fast-paced business environments, MSPs play an important role...
DevOps is often described as a combination of technology and culture. Without both, DevOps isn't complete. However, applying the culture to outdated technology is a recipe for disaster; as response times grow and connections between teams are delayed by technology, the culture will die. A Nutanix Enterprise Cloud has many benefits that provide the needed base for a true DevOps paradigm. In his Day 3 Keynote at 20th Cloud Expo, Chris Brown, a Solutions Marketing Manager at Nutanix, will explore t...
What if you could build a web application that could support true web-scale traffic without having to ever provision or manage a single server? Sounds magical, and it is! In his session at 20th Cloud Expo, Chris Munns, Senior Developer Advocate for Serverless Applications at Amazon Web Services, will show how to build a serverless website that scales automatically using services like AWS Lambda, Amazon API Gateway, and Amazon S3. We will review several frameworks that can help you build serverle...
SYS-CON Events announced today that Interoute, owner-operator of one of Europe's largest networks and a global cloud services platform, has been named “Bronze Sponsor” of SYS-CON's 20th Cloud Expo, which will take place on June 6-8, 2017 at the Javits Center in New York, New York. Interoute is the owner-operator of one of Europe's largest networks and a global cloud services platform which encompasses 12 data centers, 14 virtual data centers and 31 colocation centers, with connections to 195 add...
SYS-CON Events announced today that Linux Academy, the foremost online Linux and cloud training platform and community, will exhibit at SYS-CON's 20th International Cloud Expo®, which will take place on June 6-8, 2017, at the Javits Center in New York City, NY. Linux Academy was founded on the belief that providing high-quality, in-depth training should be available at an affordable price. Industry leaders in quality training, provided services, and student certification passes, its goal is to c...
What sort of WebRTC based applications can we expect to see over the next year and beyond? One way to predict development trends is to see what sorts of applications startups are building. In his session at @ThingsExpo, Arin Sime, founder of WebRTC.ventures, will discuss the current and likely future trends in WebRTC application development based on real requests for custom applications from real customers, as well as other public sources of information,
SYS-CON Events announced today that Telecom Reseller has been named “Media Sponsor” of SYS-CON's 20th International Cloud Expo, which will take place on June 6–8, 2017, at the Javits Center in New York City, NY. Telecom Reseller reports on Unified Communications, UCaaS, BPaaS for enterprise and SMBs. They report extensively on both customer premises based solutions such as IP-PBX as well as cloud based and hosted platforms.
FinTech is the sum of financial and technology, and it’s one of the fastest growing tech industries. Total global investments in FinTech almost reached $50 billion last year, but there is still a great deal of confusion over what it is and what it means – especially as it applies to retirement. Building financial startups is not simple, but with the right team, technology and an innovative approach it can be an extremely interesting domain to disrupt. FinTech heralds a financial revolution that...
Keeping pace with advancements in software delivery processes and tooling is taxing even for the most proficient organizations. Point tools, platforms, open source and the increasing adoption of private and public cloud services requires strong engineering rigor - all in the face of developer demands to use the tools of choice. As Agile has settled in as a mainstream practice, now DevOps has emerged as the next wave to improve software delivery speed and output. To make DevOps work, organization...
SYS-CON Events announced today that Loom Systems will exhibit at SYS-CON's 20th International Cloud Expo®, which will take place on June 6-8, 2017, at the Javits Center in New York City, NY. Founded in 2015, Loom Systems delivers an advanced AI solution to predict and prevent problems in the digital business. Loom stands alone in the industry as an AI analysis platform requiring no prior math knowledge from operators, leveraging the existing staff to succeed in the digital era. With offices in S...
SYS-CON Events announced today that T-Mobile will exhibit at SYS-CON's 20th International Cloud Expo®, which will take place on June 6-8, 2017, at the Javits Center in New York City, NY. As America's Un-carrier, T-Mobile US, Inc., is redefining the way consumers and businesses buy wireless services through leading product and service innovation. The Company's advanced nationwide 4G LTE network delivers outstanding wireless experiences to 67.4 million customers who are unwilling to compromise on ...
SYS-CON Events announced today that Cloudistics, an on-premises cloud computing company, has been named “Bronze Sponsor” of SYS-CON's 20th International Cloud Expo®, which will take place on June 6-8, 2017, at the Javits Center in New York City, NY. Cloudistics delivers a complete public cloud experience with composable on-premises infrastructures to medium and large enterprises. Its software-defined technology natively converges network, storage, compute, virtualization, and management into a ...
Deep learning has been very successful in social sciences and specially areas where there is a lot of data. Trading is another field that can be viewed as social science with a lot of data. With the advent of Deep Learning and Big Data technologies for efficient computation, we are finally able to use the same methods in investment management as we would in face recognition or in making chat-bots. In his session at 20th Cloud Expo, Gaurav Chakravorty, co-founder and Head of Strategy Development ...
Interoute has announced the integration of its Global Cloud Infrastructure platform with Rancher Labs’ container management platform, Rancher. This approach enables enterprises to accelerate their digital transformation and infrastructure investments. Matthew Finnie, Interoute CTO commented “Enterprises developing and building apps in the cloud and those on a path to Digital Transformation need Digital ICT Infrastructure that allows them to build, test and deploy faster than ever before. The int...
SYS-CON Events announced today that CA Technologies has been named “Platinum Sponsor” of SYS-CON's 20th International Cloud Expo®, which will take place on June 6-8, 2017, at the Javits Center in New York City, NY, and the 21st International Cloud Expo®, which will take place October 31-November 2, 2017, at the Santa Clara Convention Center in Santa Clara, CA. CA Technologies helps customers succeed in a future where every business – from apparel to energy – is being rewritten by software. From ...