Welcome!

News Feed Item

ETEL XYZT Planar Platform Now Available in North America

SCHAUMBURG, IL--(Marketwired - August 14, 2014) - ETEL is pleased to announce the XYZT Planar Platform is now available in North America through HEIDENHAIN Corporation. The XYZT Planar Platform is a proven, reliable stage with over 100 units currently in the field worldwide. This system provides excellent dynamic flatness and bi-directional repeatability, making it suitable for a wide range of applications.

The XYZT Planar Platform is a hybrid mechanical/air bearing stage dedicated to step-and-scan applications. The stage is modular and can be outfitted with the components best suited to each individual application. Thanks to the flexibility of the platform, it has been used in wafer process control applications such as Critical Dimension and Thin Film Metrology, as well as in Wafer Scribing and Wafer Laser Thermal Annealing.

The hybrid nature of the XYZT Planar Platform allows the user to enjoy the best qualities of both mechanical and air bearings. The mechanical bearings provide high stiffness in the XY plane, allowing for high accelerations (up to 1.2g) and great bi-directional repeatability (±0.5µm for the X and Y axes). Thanks to the air bearing, the platform is also able to provide excellent dynamic flatness over the full range of travel.

The standard XYZT Planar Platform mounts an ETEL ZT Combined Module on the gantry beam of the XY stage. The ZT Combined Module provides infinite Theta rotation and dual Z-axes: a coarse Z axis for wafer loading and unloading, and a fine Z axis for focus adjustment. This module can be replaced to best suit the needs of an application, whether that application requires only Z motion, pure Theta motion, or ZT motion with tip/tilt correction. The stroke of the X and Y axes can be adjusted to accommodate a 300mm or 450mm wafer, and even longer strokes are also available. The platform can also be integrated with ETEL's QuiET Active Isolation System to further improve system performance.

The advantages offered by the ETEL XYZT Planar Platform include, but are not limited to, the following:

• Flatness of motion given by the air bearing

• Unlimited rotation in Theta

• Built-in vacuum supply at chuck level

• Dual Z integration: Coarse travel for loading/unloading and fine travel for focus adjustment

• Compact footprint

• ISO2 clean room compatibility

• Position Stability of ±25nm for X and Y axes, ±15nm for Z axis, and ±0.2arcsec for T axis

• Bi-directional repeatability of ±0.5µm for X and Y axes, ±0.3µm for Z axis, and ±2arcsec for T axis

Detailed information about ETEL's XYZT Planar Platform is available at http://www.etel.ch/motion-systems/planar-platforms/. ETEL takes pride in their policy of full disclosure about their system performances. It is standard for all data sheets to list specifications at three-sigma to ensure the user is able to utilize the performance that the system lists.

For more information on this platform, call ETEL Systems Product Specialist Mark Skaer at 847-490-7812 ([email protected]) or Public Relations Manager Kathleen Stoneski at HEIDENHAIN at 877-565-9151 ([email protected]). ETEL's website is www.etelusa.com

ETEL S.A. is based in Switzerland with exclusive North American distribution through HEIDENHAIN Corporation in Schaumburg, IL.  As a leading international supplier of direct drive and motion control components and integrated systems, ETEL supports high tech industry with linear motors, torque motors, positioning stages, and motion controllers/systems.

The following files are available for download:

More Stories By Marketwired .

Copyright © 2009 Marketwired. All rights reserved. All the news releases provided by Marketwired are copyrighted. Any forms of copying other than an individual user's personal reference without express written permission is prohibited. Further distribution of these materials is strictly forbidden, including but not limited to, posting, emailing, faxing, archiving in a public database, redistributing via a computer network or in a printed form.

Latest Stories
Qosmos has announced new milestones in the detection of encrypted traffic and in protocol signature coverage. Qosmos latest software can accurately classify traffic encrypted with SSL/TLS (e.g., Google, Facebook, WhatsApp), P2P traffic (e.g., BitTorrent, MuTorrent, Vuze), and Skype, while preserving the privacy of communication content. These new classification techniques mean that traffic optimization, policy enforcement, and user experience are largely unaffected by encryption. In respect wit...
Deploying applications in hybrid cloud environments is hard work. Your team spends most of the time maintaining your infrastructure, configuring dev/test and production environments, and deploying applications across environments – which can be both time consuming and error prone. But what if you could automate provisioning and deployment to deliver error free environments faster? What could you do with your free time?
SYS-CON Events announced today that Hitrons Solutions will exhibit at the 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. Hitrons Solutions Inc. is distributor in the North American market for unique products and services of small and medium-size businesses, including cloud services and solutions, SEO marketing platforms, and mobile applications.
Smart Cities are here to stay, but for their promise to be delivered, the data they produce must not be put in new siloes. In his session at @ThingsExpo, Mathias Herberts, Co-founder and CTO of Cityzen Data, will deep dive into best practices that will ensure a successful smart city journey.
SYS-CON Events announced today that 910Telecom will exhibit at the 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. Housed in the classic Denver Gas & Electric Building, 910 15th St., 910Telecom is a carrier-neutral telecom hotel located in the heart of Denver. Adjacent to CenturyLink, AT&T, and Denver Main, 910Telecom offers connectivity to all major carriers, Internet service providers, Internet backbones and ...
SYS-CON Events announced today that eCube Systems, a leading provider of middleware modernization, integration, and management solutions, will exhibit at @DevOpsSummit at 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. eCube Systems offers a family of middleware evolution products and services that maximize return on technology investment by leveraging existing technical equity to meet evolving business needs. ...
DevOps at Cloud Expo – being held November 1-3, 2016, at the Santa Clara Convention Center in Santa Clara, CA – announces that its Call for Papers is open. Born out of proven success in agile development, cloud computing, and process automation, DevOps is a macro trend you cannot afford to miss. From showcase success stories from early adopters and web-scale businesses, DevOps is expanding to organizations of all sizes, including the world's largest enterprises – and delivering real results. Am...
Pulzze Systems was happy to participate in such a premier event and thankful to be receiving the winning investment and global network support from G-Startup Worldwide. It is an exciting time for Pulzze to showcase the effectiveness of innovative technologies and enable them to make the world smarter and better. The reputable contest is held to identify promising startups around the globe that are assured to change the world through their innovative products and disruptive technologies. There w...
Internet of @ThingsExpo, taking place November 1-3, 2016, at the Santa Clara Convention Center in Santa Clara, CA, is co-located with 19th Cloud Expo and will feature technical sessions from a rock star conference faculty and the leading industry players in the world. The Internet of Things (IoT) is the most profound change in personal and enterprise IT since the creation of the Worldwide Web more than 20 years ago. All major researchers estimate there will be tens of billions devices - comp...
DevOps at Cloud Expo, taking place Nov 1-3, 2016, at the Santa Clara Convention Center in Santa Clara, CA, is co-located with 19th Cloud Expo and will feature technical sessions from a rock star conference faculty and the leading industry players in the world. The widespread success of cloud computing is driving the DevOps revolution in enterprise IT. Now as never before, development teams must communicate and collaborate in a dynamic, 24/7/365 environment. There is no time to wait for long dev...
SYS-CON Events announced today that StarNet Communications will exhibit at the 19th International Cloud Expo, which will take place on November 1–3, 2016, at the Santa Clara Convention Center in Santa Clara, CA. StarNet Communications’ FastX is the industry first cloud-based remote X Windows emulator. Using standard Web browsers (FireFox, Chrome, Safari, etc.) users from around the world gain highly secure access to applications and data hosted on Linux-based servers in a central data center. ...
Traditional on-premises data centers have long been the domain of modern data platforms like Apache Hadoop, meaning companies who build their business on public cloud were challenged to run Big Data processing and analytics at scale. But recent advancements in Hadoop performance, security, and most importantly cloud-native integrations, are giving organizations the ability to truly gain value from all their data. In his session at 19th Cloud Expo, David Tishgart, Director of Product Marketing ...
Data is the fuel that drives the machine learning algorithmic engines and ultimately provides the business value. In his session at Cloud Expo, Ed Featherston, a director and senior enterprise architect at Collaborative Consulting, will discuss the key considerations around quality, volume, timeliness, and pedigree that must be dealt with in order to properly fuel that engine.
19th Cloud Expo, taking place November 1-3, 2016, at the Santa Clara Convention Center in Santa Clara, CA, will feature technical sessions from a rock star conference faculty and the leading industry players in the world. Cloud computing is now being embraced by a majority of enterprises of all sizes. Yesterday's debate about public vs. private has transformed into the reality of hybrid cloud: a recent survey shows that 74% of enterprises have a hybrid cloud strategy. Meanwhile, 94% of enterpri...
There is growing need for data-driven applications and the need for digital platforms to build these apps. In his session at 19th Cloud Expo, Muddu Sudhakar, VP and GM of Security & IoT at Splunk, will cover different PaaS solutions and Big Data platforms that are available to build applications. In addition, AI and machine learning are creating new requirements that developers need in the building of next-gen apps. The next-generation digital platforms have some of the past platform needs a...