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Rudolph Wins Yield Management Software Sale from the College of Nanoscale Science and Engineering

Rudolph Technologies, Inc. (NYSE:RTEC) announced today that the SUNY College of Nanoscale Science and Engineering (CNSE), Albany, NY, has selected its Discover Enterprise Yield Management Software (YMS) to provide an integrated data warehouse and analytics system for the Global 450 Consortium (G450C) equipment development program. The Rudolph YMS will be used to combine all types of manufacturing data from defect, metrology, process, test and wafer tracking into a single system for comprehensive analysis. The software includes patented analytics specific to the semiconductor industry that will enable G450C to accelerate its process development for this strategic, half-billion dollar program for the industry.

Paul Farrar, general manager of CNSE’s G450C program, said, “As part of our focus on 450mm manufacturing we are not just qualifying the process tools and materials but also the next generation of controls and methodologies necessary to meet the new dynamics created by consumer demands. Rudolph software has an established architecture that aggregates all data collected in the factory into a single database and then applies advanced analytics to that database in order to make sense of the data. These techniques will benefit multiple industries as well as leading-edge 300mm fabs and next generation advanced packaging lines.”

“It was very gratifying to learn that CNSE, after a thorough evaluation of multiple competitive company’s technology and proposals, has chosen Rudolph to be its partner and supplier of data warehousing and analytics,” said Ardy Johnson, Rudolph’s senior vice president of corporate alliances. “We are encouraged to have this important validation of our technology.”

Discover Enterprise is a comprehensive yield management system that aggregates and stores manufacturing data and provides real-time manufacturing monitoring and in-line yield management. It is the foundation of a fully-integrated database and analytical routines that help semiconductor, LED, compound semiconductor, automotive, FPD, HDD and other related manufacturers improve yield, productivity and profitability in their manufacturing lines. It integrates and analyzes data from all inspection, metrology, process, fault detection, run-to-run and test systems in the fab and across the supply chain (from wafer to final packaging) to provide a complete report of fab-wide yield problems, turning raw data into actionable information that separates random from systematic yield loss. Engineers use this information to optimize process tool performance (fleet management) and quickly identify and correct the causes of yield excursions.

Genesis Enterprise is Discover Enterprise’s powerful analytics engine that provides data mining, genealogy (unit tracking) and correlation of all data types across the supply chain. The system is designed to maximize factory efficiency and automate the drill down process of identifying causes of yield loss. Specialized analysis algorithms identify domain-specific issues, such as wafer processing sequence problems, commonality of effects, product characterization and systematic versus random yield loss.

For more information about Rudolph’s Discover Enterprise Software, please visit www.rudolphtech.com.

The SUNY College of Nanoscale Science and Engineering (CNSE) is the world leader in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE represents the world’s most advanced university-driven research enterprise, with more than $20 billion in high-tech investments and over 300 corporate partners. The 1.3 million-square-foot Albany NanoTech megaplex is home to more than 3,100 scientists, researchers, engineers, students, and faculty. CNSE maintains a statewide footprint, operating the Smart Cities Technology Innovation Center (SCiTI) at Kiernan Plaza in Albany, the Solar Energy Development Center in Halfmoon, the Photovoltaic Manufacturing and Technology Development Facility in Rochester, and the Smart System Technology and Commercialization Center (STC) in Canandaigua. CNSE co-founded and manages the Computer Chip Commercialization Center (Quad-C) at SUNYIT, and is lead developer of the Marcy Nanocenter site in Utica, as well as the Riverbend Green Energy Hub, High-Tech Manufacturing Innovation Hub, and Medical Innovation and Commercialization Hub, all in Buffalo. For information, visit www.sunycnse.com.

About Rudolph Technologies
Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, advanced packaging lithography, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The Company’s expanding portfolio of equipment and software solutions is used in both the wafer processing and final manufacturing of ICs, and in adjacent markets such as FPD, LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company’s website at www.rudolphtech.com.

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include the benefits to customers of Rudolph’s products, Rudolph’s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph’s ability to meet the expectations and needs of our customers as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company’s ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph’s Form 10-K report for the year ended December 31, 2013 and other filings with the Securities and Exchange Commission. As the forward-looking statements are based on Rudolph’s current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

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